Clean Gas Filter

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Clean Gas Filter SFA

Cartridge Type / Disc

Series Operating pressure Filtration
SFA100·200·300 CAD Max. 1.0MPa
(Vacuum: 1.3 x 10-6kPa)		 0.01μm
Features Cartridge type allows element replacement.

Clean Gas Filter SFB

Cartridge Type / Straight

Series Operating pressure Filtration
SFB100·200 CAD Max. 1.0MPa
(Vacuum: 1.3 x 10-6kPa)		 0.01μm
Features Cartridge type allows element replacement.

Clean Gas Filter SFB

Disposable Type / Straight

Series Operating pressure Filtration
SFB300 CAD Max. 1.0MPa
(Vacuum: 1.3 x 10-6kPa)		 0.01μm
Features Compact disposable type for semiconductor industry

Clean Gas Filter SFC

Disposable Type / Multiple Disc

Series Operating pressure Filtration
SFC100 CAD Max. 1.0MPa
(Vacuum: 1.3 x 10-6kPa)		 0.01μm
Features Compact disposable type for semiconductor industry

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