11/22-MXPJ6, Miniature High Precision Slide T-L-5d

The 11/22-MXPJ6 miniature high precision slide table provides travelling parallelism of 0.004 mm and non-rotating accuracy of +/-0.03° in a compact package, height: 17 mm and width: 20mm. Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the movement of the piston rod and seals. A vacuum relief port has been added to suction any particles so no dust can be released into the clean room. A dust cap over the piston end cap further prevents dust generation. A special PTFE grease has been applied to 11-MXPJ6's linear guide and piston to inhibit dust generation. A special lithium grease has been applied to 22-MXPJ6's linear guide and piston to inhibit dust generation. For 22-MXPJ6, additionally, copper is not used as a product material as well as substances including halogen (fluorine, chlorine, bromine and iodine) or compounded with silicon are not used.