The 11-MXJ miniature precision slide table provides travelling parallelism of 0.005 mm in a compact package, height: 10 mm and width: 20mm for the 4 mm bore size. . Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the movement of the piston rod and seals. A special PTFE grease has been applied to both the linear guide and piston to inhibit dust generation. A vacuum relief port, which can be specified on either the right or left-side of the body, has been added to suction any particles so no dust can be released into the clean room. The ports and switch grooves can also be specified on either the right or left-side of the body, in a symmetrical location in order to minimize side clearance for adjacent mounting applications.