High Performance Heat Exchanger
The HRW heat exchanger is a refrigerant-free, water-cooled thermo-chiller designed for high-precision temperature control (±0.3°C) in industrial processes ranging from 20°C to 90°C. It uses an inverter pump for demand-based rotation control. The HRW is used for high-precision temperature control in the semiconductor industry, where it regulates chamber electrodes in etching, spatter, cleaning, and coating equipment.