SEMI Standard Chiller

SEMI standard chillers use high-performance double inverter technology to simultaneously regulate both the compressor and the pump, achieving a precise temperature control of up to ±0.1°C under fluctuating heat loads. By integrating environmentally friendly refrigerants like CO₂and R454C, they ensure future-proof compliance with global environmental regulations while maintaining the strict safety and ergonomic benchmarks required by SEMI standards.

HRZC, CO2 Refrigerant

The HRZC is a water-cooled recirculating chiller for high technology sectors which employs CO₂ as a new refrigerant. It is a pinnacle of green semiconductor technology and balances extreme precision with strict environmental mandates. The HRZC is a high-precision chiller paired with a Double Inverter system for the compressor and pump.

HRZF010, R454C Refrigerant

The HRZF010 is a high-performance, water-cooled refrigerated thermo-chiller designed for the most demanding technical environments on the planet, including semiconductor fabrication facilities which are strictly controlled environments. Its double inverter allows the chiller to maintain +/- 0.1°C stability and speeds up or slows down the motors to match the exact cooling load, potentially reducing energy consumption by up to 65%.

INR-495 Thermo-Chillers with CO2 Refrigerant

The INR-495-042/043 thermo chiller is a highly specialized recirculating chiller that represents the next generation of environmental compliance in semiconductor manufacturing. Larger than the HRZC and HRZF, the INR-495 has been engineered to match the specs and legacy footprint of older, high-GWP chillers that need to be replaced. Because CO2 is non-toxic and non-flammable, the INR-495 can be transported by air when a replacement chiller is needed quickly.

SEMI Standard Chiller

HRZC, CO2 Refrigerant

HRZF010, R454C Refrigerant

INR-495 Thermo-Chillers with CO2 Refrigerant

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