Electric Actuator Products for Clean Rooms

SMC clean room electric actuators are a specialized line of actuators designed for environments where particulate contamination must be strictly controlled. They translate electrical energy into precise linear or rotary motion while adhering to high-grade cleanliness standards. Clean room actuators use low-particle-generating components and specialized fluorine grease that is inert to chemicals and temperature fluctuations. Features include battery-less absolute encoders and compatibility with industrial protocols such as IO-Link, EtherNet/IP, and Profinet.

11-LEFG, Support Guide, Ball Screw, Clean Room

The 11-LEFG Support Guide is a non-motorized linear component designed to complement motorized sliders by providing structural support for significantly overhanging workpieces in clean room environments.It ensures smooth, parallel motion for large loading platforms in multi-axis pick-and-place systems. Available in body sizes 16 through 40 and strokes up to 1000 mm, it offers the same dynamic allowable moment as motorized sliders, making it an essential auxiliary for high-precision, heavy-load automation.

11-LEFS Electric Actuator, Ball Screw Drive

The Clean Room compatible LEF series is a specialized slider-type electric actuator designed for high-precision motion control in cleanrooms. It features a low-profile design and a unique seal band that covers the internal guide and screw to prevent grease splatter or particle contamination. For enhanced cleanliness, the unit includes built-in vacuum piping with an exhaust port to actively remove generated particles during operation. Designed for ease of use, it allows for mounting without removing exterior covers and offers an "easy mode" for rapid start-up when ordered with a pre-set SMC controller.

Clean Room AC Servo Sliders

The LEF series slider type electric actuators are high-performance linear motion solutions specifically engineered to meet ISO Class 4 (US FED STD 209E Class 10) cleanliness standards. They feature a built-in vacuum port that extracts internal particles generated by the ball screw and guides during operation. These sliders support high-resolution encoders (up to 22-bit) and provide superior control over speed, acceleration, and positioning making them ideal for high-precision transport tasks in the semiconductor, pharmaceutical, and electronic assembly industries.

Electric Actuator Products for Clean Rooms

11-LEFG, Support Guide, Ball Screw, Clean Room

11-LEFS Electric Actuator, Ball Screw Drive

Clean Room AC Servo Sliders

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