Clean Room AC Servo Sliders

The LEF series slider type electric actuators are high-performance linear motion solutions specifically engineered to meet ISO Class 4 (US FED STD 209E Class 10) cleanliness standards. They feature a built-in vacuum port that extracts internal particles generated by the ball screw and guides during operation. These sliders support high-resolution encoders (up to 22-bit) and provide superior control over speed, acceleration, and positioning making them ideal for high-precision transport tasks in the semiconductor, pharmaceutical, and electronic assembly industries.

11-LEFS, Clean Room, AC Servo Motor

The SMC 11-LEFS is an AC servo motor-driven version of the slider-type electric actuator engineered for high-precision motion in clean room environments. It offers a compact footprint with body sizes 25, 32, and 40, supporting maximum workloads of up to 60 kg and speeds up to 1000 mm/s. This series provides exceptional positioning repeatability of ±0.02mm (or ±0.01mm for high-precision models), making it a reliable solution for delicate semiconductor and medical assembly tasks.

11-LEJS, Wide Body, Clean Room, AC Servo Motor

The SMC 11-LEJS is a high-rigidity, wide-body electric slider actuator designed for clean room applications. This model is powered by an AC servo motor with options for incremental or absolute encoders and supports multiple communication protocols, including ethernet and pulse input. With body sizes of 40 and 63, it can handle workloads up to 85 kg and speeds of 1800 mm/s, offering a stroke range of 200 to 1500 mm with positioning repeatability as precise as ±0.01 mm in its high-precision configuration.

Clean Room AC Servo Sliders

11-LEFS, Clean Room, AC Servo Motor

11-LEJS, Wide Body, Clean Room, AC Servo Motor

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